top of page

FFIE

Full Field Imaging Ellipsometry

A new approach for performing full field imaging ellipsometry (FFIE) was developed, which uses a high numerical aperture microscope objective lens to illuminate a 2D object's surface. The light reflected from each point of the surface is gathered by the same lens and projected onto a 2D CCD detector array, thus enabling the measurement of numerous surface points simultaneously. Using this simple method, areas of up to 0.9 cm^2 can be measured with high accuracy. This technique can bring great benefits to the scientific community and nanotechnology engineers facing the need to analyze large thin film surfaces.

Articles

A. Karsenty, Z. Weig, S. Feldman, Y. Arieli, “Full Field Imaging Ellipsometry (FFIE) Platform using CCD Camera and Advanced Software for Simultaneous Spots’ Sensing and Measurement”, International Journal of Measurement Technologies and Instrumentation Engineering (IJMTIE) 6(1), 33-45, 2017. doi: https://doi.org/10.4018/IJMTIE.2017010104



Jerusalem College of Technology

21 Havaad Haleumi St

Jerusalem 9116001, Israel

Tel: +972-2-6751140

  • ReaserchGate
  • Google Scholar
  • LinkedIn
bottom of page